In-house research

ARTEMIS

| Energy, Industry

Atomic resolution analytical TEM/STEM facility for correlative microstructural and functional in situ and operando investigations

 

Participants

Project Coordinator: National Institute of Materials Physics
Project Partners: Central European Research Infrastructure Consortium
Contact point: projects@ceric-eric.eu

Project Summary

ARTEMIS aims for the upgrade of the existing HRTEM research infrastructure at NIMP, in order to facilitate the approach of in situ and operando analytical TEM/STEM on functional materials for energy and semiconductor industry. A double-sided upgrade is envisaged, referring to the improvement of the existing technique for thin lamella preparation and of the analytical capabilities on our HRTEM instrument. The first part considers the upgrade of the existing nanomanipulator of the Tescan Lyra III SEM-FIB instrument at NIMP. The new nanomanipulator will enable the complex (translation/rotation) and precise manipulation at nanoscale of microobjects under the electron/ion beam of the SEM-FIB instrument, which is a key element for successfully extracting thin lamellas from microbatteries or semiconductor microdevices, their mounting on specialized MEMS holders and applying electrical microcontacts for operando TEM investigations.

Total budget for the implementation of the action: EUR 410.000

Timeline

Start Date: July 2023
End Date: June 2026