Labs and instruments

Microfabrication Laboratory

of TU Graz at Elettra Sincrotrone Trieste

Microfabrication Laboratory is a microfabrication facility, with a special focus on microfluidics and micro components production.

It offers a pool of instruments to perform standard microfabrication processes based on UV-lithography and/or PDMS casting. It is currently equipped with a laminator and a spin coater to prepare samples that can be successively patterned, and with a UV KUB-3 lithography station at wavelength of 365 nm  with a resolution of 5 µm. Hot plates under a chemical hood and a programmable oven reaching a maximum temperature of 1100C° are available for post bake processing and for PDMS curing. There is a Leica optical microscope connected to a camera to check the quality of the microfabricated structures, and a Zepto RIE O2 plasma system for the effective cleaning of substrates and to perform bonding of standard microfluidic chips. This allows fabricating among the others microfluidic circuits, diffraction gratings, pillars and hole arrays, microgears. There are also syringe pumps available to test microfluidic devices.

The following instruments are available at the laboratory:

  • Workstation for microscope images
  • Leica MZ12.5 Microscope
  • BCE Orma precision electronic balance
  • UV Kub-3 lithography station
  • Fridge
  • Laurell Spin coater
  • Hot plates with magnetic stirrers
  • Keithley power supply and gold electrodeposition system
  • Carbolite oven with Eurotherm controller
  • Falcon K (CE) Rolling machine
  • Zepto RIE Plasma system with O2 bottle
  • LS3V Remet Lapping machine
  • Bicasa laminar flow hood
  • GS 800 chemical hood
  • Labor Security System Chemical cabinet
  • Elma ultrasonic bath

Contact: Benedetta Marmiroli
Tel: +39 040 375 8708 (office)